VL826 Sensor Technology and MEMS

Course Name: 

VL826 Sensor Technology and MEMS


M.Tech (VLSI)


Elective (Ele)

Credits (L-T-P): 

(3–0-0) 3


Sensor types and Classification – Mechanical, acoustic, magnetic, thermal, chemical, radiation and bio sensors; Micro-sensor; sensors based on surface acoustic wave devices; Micro-machining technology, bulk, surface and other micro-machining techniques’ MEMS for automotive, communication, signal processing applications; Modeling and simulation of Micro-sensors and actuators; sensors and smart structures; micro-opto-electromechanical sensors.


Ristic L (Ed), Sensor Technology and Devices, Artech House, 1994.
Sze S.M. (Ed), Semiconductor Sensors, John Wiley, 1994.
Wise K.D., Integrated Sensors, Microactuators and Microsystems (MEMS), Special Issue of Proceedings of IEEE, Vol. 86, No. 8, August-1998.
Stephen D. Senturia, Microsystem Design, Kluwer Academic Press, 2001
Baltes et. Al (Eds.), CMOS – MEMs, Advanced micro and nano systems, Vol. 2, Wiley-VCH, 2005

Contact us

Dr. T. Laxminidhi,  Professor and Head, 
Department of E&C, NITK, Surathkal
P. O. Srinivasnagar,
Mangalore - 575 025 Karnataka, India.

  • Hot line: +91-0824-2473046

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