EC441 MEMS and Nano Technology

Course Name: 

EC441 MEMS and Nano Technology


B.Tech (ECE)


Programme Specific Electives (PSE)

Credits (L-T-P): 

(3-0-0) 3


Introduction, emergence, devices and application, scaling issues, materials for micro- and nano-scale size domains; MEMS materials and processes; MEMS devices and applications; nanostructures in semiconductors and metals; introduction to quantum effects in nanostructures; nanostructure applications. Fabrication Technologies: MEMS Sensors and Actuators, Nanostructures, Nanoelectronic Semiconductor Devices, Quantum Devices in Nanostructures.


Chang Liu, Foundations of MEMS, Prentice Hall, 2006.
Gabriel M. Rebiez, RF MEMS: Theory, Design, and Technology, John Wiley & Sons, 2003.
G.K. Ananthasuresh, K.J. Vinoy, S. Gopalakrishnan, K.N. Bhat and V.K. Aatre, Micro and Smart Systems, John Wiley & Co, 2011.
V.K. Varadan, K.J. Vinoy, and K.A. Jose, RF MEMS and their Applications, London: John Wiley, 2010.
Stepan Lucyszyn, Advanced RF MEMS, Cambridge univ. Press, 2010.
Springer Handbook of Nanotechnology, 2011.
Neeraj K. Jha et. al., Nanoelectronic Circuit Design, Springer Publications, 2011.
Lundstrom and Guo, “Nanoscale Transistors”, Springer Publications, 2006

Contact us

Dr. T. Laxminidhi,  Professor and Head, 
Department of E&C, NITK, Surathkal
P. O. Srinivasnagar,
Mangalore - 575 025 Karnataka, India.

  • Hot line: +91-0824-2473046

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